Instrument List

Crystal Growth Laboratory

Thin Films Laboratory

  • Sputtering System
  • Co-Sputtering System
  • Thermal Evaporation System
  • Spin Coating System
  • CVD Furnaces

Structural Analysis Laboratory

  • X-ray Diffraction (XRD) System
  • Secondary Ion Mass Spectrometer (SIMS)
  • Profilometer System

Surface Analysis Laboratory

  • Atomic Force Microscope (AFM)
  • X-ray Photoelectron Spectrometer (XPS)

Electrical Analysis Laboratory

  • Hall Effect System
  • Deep Level Transient Spectroscopy (DLTS)
  • Current-Voltage (I-V) System
  • Capacitance-Voltage (C-V) System

Optical Analysis Laboratory

  • Photoluminescence (PL) System
  • Fourier Transform Infrared Spectroscopy (FTIR)
  • Spectroscopic Ellipsometry (SE) System
  • Ultraviolet - Visible (UV-VIS) Spectroscopy

Micro/Nano Printing Laboratory

  • Inkjet Printing System
  • Aerosol Jet Printing (AJP) System

Clean Room

  • Mask Alignment System (MJB4)
  • Etching Systems (Wet + Dry etching)
  • Vacuum Thermal Evaporation
  • Rapid Annealing System (RTA)
  • Spin Coating
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